Target Markets
- Semiconductor solvent heating
- High-purity liquid heating
Specifications
- PUR-X 2000: 5.0kW – 7.9kW, 120V, 200V, 208V,
220V, 230V, 240V, 380V, 400V, 415V, 480V
- Explosion Resistant (NEMA 7) electrical enclosure
- Tubing, .375” (3/8”) O.D. x .031” wall, field replaceable
- Standard PFA
- High purity PFA, compliant with SEMI F57
- 325” Long (27ft or 8.3m)
- Tube size & length are the same for both standard
PFA & high purity PFA
- Body: Aluminum 319, Teflon®-coated
- Maximum operating temperature: 200°C (392°F)
- Two sensors, for process control and process high-limit, choice of J or K type thermocouples
- Third sensor (J or K type, matching the selected process sensors) for casting and tube protection. Requires independent high limit control loop set no higher than 235° C (455° F).
- Optional insulation jacket
- Optional fittings, PFA 3/8" Straight Union, Semi F57 compliant
- 70 psi max (480 kPa)
Size and weight:
- PUR-X 2000: 4.3” O.D. (10.9cm) x 22” (55.9cm) tall,
29 lbs (13.1Kg) (includes housing)
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PUR-X-2000 without insulation jacket
PUR-X-2000 with insulation jacket |